Rotary Table
High speed/precision index rotary system
3 Type (Air Bearing, Ball Retainer, Roller Retainer)
Feature
-
Process Performance
· Radial Runout: 1㎛
· Axial Runout: 1㎛
· Maximum Speed: *Consultation
· Maximum Acceleration: *Consultation
· Maximum Load: *Consultation
-
Productivity / Hardware
· 3 Type
- Air Bearing: Low payload, High precision
- Ball Retainer: Middle payload, High precision
- Roller Retainer: High payload, High precision
· High precision rotation performance
· Selectable hollow bore type when manufacturing with ball of roller retainer type
· Customize according to customer requirement specification
Specifications
| Parameter | X Axis | θ-Axis 1 | θ-Axis 2 |
| Stroke | 15 mm | ±360° | 0-180° |
| Payload | 30N | 10KG | |
| Flatness | ±2um@F.T | ||
| Straightness | ±2um@F.T | ||
| Eccentricity | ±1.5um | ±1.5um | |
| Tilt Error or Wobble | 1" | 1" | |
| Resolution | ≤15nm | 0.2" | 0.2" |
| Position Accuracy | ≤±1um | ±3" | ±3" |
| Repeatability | ≤±0.5um | ±2" | ±2" |
| Stability | <50nm | ||
| Velocity | 300mm/s | 720deg/s | 360deg/s |
| Acceleration | 0.2G | 3000deg/s2 | 3000deg/s2 |
| Settling Time | ≤0.5s | ≤0.1s | ≤0.1s |
Pitch | ≤10" | ||
| Roll | ≤10" | ||
| Run-out (Axial & Radial) | 1um | 1um | |
| Mass | Customizable | ||
■ Customizable
Hardware/Software UI
