Feature
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Process Performance
· Overall Dimension: 380mm X 400mm X 480mm
· Linear Motor drive based on LM guideways
· Application of high precision hollow bore DD motor
· High precision rotation control
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Productivity / Hardware
· Precision alignment of target through precise transport
· Application of Precision grade rotary tables
· Application of GORE cable certified for ISO Class 1 Cleanroom
· RAYDENT Treatment of assembly parts
· Customize according to customer requirement specification
Specifications
| Parameter | X Axis | θ-Axis 1 | θ-Axis 2 |
| Stroke | 155 mm | ±360° | 0-180° |
| Payload | 30N | 10KG | |
| Flatness | ±2um@F.T | ||
| Straightness | ±2um@F.T | ||
| Eccentricity | ±1.5um | ±1.5um | |
| Tilt Error or Wobble | 1 arc-sec | 1 arc-sec | |
| Resolution | ≤15nm | 0.2 arc-sec | 0.2 arc-sec |
| Position Accuracy | ≤±1um | ±3 arc-sec | ±3 arc-sec |
| Repeatability | ≤±0.5um | ±2 arc-sec | ±2 arc-sec |
| Stability | <50nm | ||
| Speed | 300mm/s | 720deg/sec | 360deg/sec |
| Acceleration | 0.2G | 3000deg/s2 | 3000deg/s2 |
| Settling Time | ≤0.5s | ≤0.1s | ≤0.1s |
Pitch | ≤10" | ||
| Roll | ≤10" | ||
| Axial Error | 1um | 1um | |
| Radial Error | 1um | 1um | |
| Mass | Customizable | ||
■ Customizable
Hardware/Software UI
