3D Alignment System
System that can precisely measure and align payloads used in satellite
Contact SalesFeature
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Process Performance
· Size of Granite Plate: 9000mm X 3000mm X 500mm
· Damping Performance: 95% Vibration Suppression over 3Hz
· Angular Accuracy of Moving Post: < 4”
· Improved position accuracy through position control of moving post using laser
· Flatness of Mater Mirror: ≤ λ/4 (Peak to Peak)
· Angular Accuracy of Master Mirror: < 2”
· Pitch, Yaw, Roll: < 2”
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Productivity / Hardware
· Measuring the vertical, horizontal angle and alignment of the payloads using 4 theodolites
· Fix measurement object using a jig on the granite plate
· Application of vibration isolator to minimize environmental impact
· Calibrate theodolite using a master mirror installed in both corners of a granite plate
Specifications
■ General Specifications
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Horizontal Axis |
Vertical Axis |
|
|
Stroke |
Long axis: 5m / Short axis: 2.5m |
620mm |
|
Resolution |
0.1um |
0.5um or 0.1um |
|
Accuracy |
Long axis: 5um / Short axis: 2.5um |
1um (after Compensation) |
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Repeatability |
2um |
1um |
|
Maximum Velocity |
200mm/s |
100mm/s |
|
Maximum Acceleration |
500mm/s2 |
300mm/s2 |
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Angular Accuracy |
2" |
2" |
|
Maximum Permissible Angular Error among posts |
4" |
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■ Master Mirror Specifications
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Specification |
|
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Post Positions |
Two Corners on granite plate |
|
|
Mirro |
Meterial |
Fused Silica |
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Size |
620mm X 120mm X 120mm |
|
|
Squareness |
< 3.5" (2um@120mm) |
|
|
Flatness |
λ/3 @ 100mm X 620mm λ/8 @ 50mm X 620mm Center
area, where λ=633nm |
|
|
Reflectivity |
> 94% |
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■ Damper Specifications
|
Parameter |
Specification |
|
Type |
Active type 4ea Passive type 10ea |
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Vibration Reduction |
95% noise reduction for the above 3Hz vibration |
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Vibration Criteria |
< VC-E |
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Max. Payload |
< 60ton |
