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Excimer Laser Annealing Equipment System
ELA 6G-TV-1000

6th Gen Mass Production Equipment for Flexible AMOLED Panel 


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Specifications


Laser Model
TwinVYPER
Laser Wavelength
308nm
Laser Stabilized Power (Max.)
2400W (4000mJ)
Laser Repetition Rate (Max.)
600Hz
Laser Energy Stability
≤ 0.35%
Laser Pulse Duration
24 ± 4ns
Line Beam Size
1000 mm X 0.6 mm
Stage Type
6G Single Plane Air Bearing X, Y Stage with Z & R axis