Coordinate Measuring Machines

X-Ray Inspection System

Display System

In-line / Industrial Solutions

Company

닫기버튼

      Thin Film Coating
      Mini Coater

      Equipment that uniformly sprays and coats specimen using coating fluids such as photoresist(PR) and silver nanowire

      Control coating thickness by controlling injection quantity and stage speed


      Contact Sales
      Feature

      • Process Performance


        · Y-axis: Granite Guide + Air Bearing

         - Granite Flatness: < ±3㎛

         - Air Bearing Type: Single Orifice Type


        · Vacuum Chuck

         - Chuck Flatness: ±5㎛ over full area

         - Chuck Vacuum Pressure: 600 mmHg


        · LVDT Sensor

         - Measuring Range: ± 1mm

         - Accuracy: 1㎛

         - Repeatability: 0.15㎛

      • Productivity / Hardware

          · Thin film coating for 2 types of specimen(200mm X 100mm, 50mm X 50mm)

          · Thin film coating utilizing the precision transfer stage and real-time monitoring enable active operation

          · The precision transfer stage based on air bearing

          · The double drive of z-axis enables stable tilting even in continuous product input.

          · Syringe that precisely controls the flow rate of the coating fluid and nozzle that spray evenly fluid


      Specifications



      Categorization
      Specification
      Travel Length
      X
      13mm
      Y
      350mm
      Z
      50mm
      Resolution
      X
      0.01um
      Y
      0.05 um
      Z
      0.05um
      Accuracy
      Y
      ±1.0um @ F.S.
      Z
      ±3.0um @ F.S.
      Max. Velocity
      Y
      200mm/s
      Z
      15mm/s
      Velocity Ripple
      Y
      ±0.05% @ 100mm/s
      ±0.5% @ 5mm/s

      X,Z
      Not determined
      Moving Mechanism
      X
      Manual Stage
      Y
      Linear Motor + Air bearing
      Z
      AC Motor + Harmonic Gear + Ball Screw
      Chuck Flatness
      ±5um over full area

      ■ Customizable Hardware/Software UI