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Precision Transfer Stage

Equipment that can precisely measure changes in parts assembly and system level in order for payloads used in satellite to work properly


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Feature
  • Process Performance

    · Moving Stroke: 2000mm

    · Operating Resolution: 0.1㎛

    · Accuracy: 2㎛

    · Repeatability(@3σ): < 2㎛

    · Max Velocity: 200mm/s


  • Productivity / Hardware

    · Measuring payloads using stage moving along the face of the granite plate and top sensor of stage(Theodolite)

    · Granite base frame

    · Pitch, Yaw, Roll : < 2”

    · Customize Hardware / UI Software


Specifications


Description
Specifications
Axial
Horizontal
Vertical
Moving Stroke
2000mm
600mm
Operating Resolution
0.1um
0.1um
Accuracy
2um
2um
Repeatability
<2um
<2um
Max Velocity
200mm/s
100mm/s
Perpendicularity of travelling axes
2"
2"
Angular Stability
2"
2"
Scale
Zerodur Glass Ceramic
Zerodur Glass Ceramic
Max Velocity
200mm/s
100mm/s
Driving Mechanism
Harmonic Motor Rack & Pinion

Harmonic Motor Rack & Pinion


Mass
500kg


■ Customizable Hardware/Software UI