Printed electronic CMM
Measurement and inspection of printing plates or printing rolls for manufacturing of flexible printed electronic device
Measuring the shape of the micro pattern: Width and thickness
Measuring the thickness of a thin film layer on substrate
Measuring a shape and imprinted pattern of printed electronic rolls
Feature
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Process Performance
· Application of the Invar scale with less thermal strain
· Application of air bearing and linear motor to enable precision drive
· Application of multi sensor for compound measurement
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Productivity / Hardware
· Measurement/Inspection method and algorithm specialized in flexible printed electronic device
· Equipment/process calibration and monitoring (In-line, Off-line)
· Improved Feedback about CDU/Overlay budget breakdown and Equipment/process
· Detection and classification solution of printing process defect
· Customize Hardware / UI Software
Specifications
Parameter | Categorization | Specification |
Pattern Position Measurement | XYZ Repeatability | 2.5um |
XYZ Accuracy | 5um | |
Rotary Repeatability | 2.5um | |
Rotary Accuracy | 5um | |
Pattern shape measurement | Lateral Resolution | 0.5um |
Vertical Resolution | 0.1um | |
Thickness measurement | Repeatability | 10% |
Resolution | 10um | |
Roll shape measurement | Roundness & Cylindricity | 2.5um (선 길이 환산) |
Diameter Repeatability | 2.5um | |
Diameter Accuracy | 5um | |
Throughput | XYZ Settling Time | 500ms |
Rotary Settling Time | 500ms |
■ Customizable Hardware/Software UI