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Printed electronic CMM

Measurement and inspection of printing plates or printing rolls for manufacturing of flexible printed electronic device

Measuring the shape of the micro pattern: Width and thickness

Measuring the thickness of a thin film layer on substrate

Measuring a shape and imprinted pattern of printed electronic rolls


Contact Sales
Feature
  • Process Performance

    · Application of the Invar scale with less thermal strain

    · Application of air bearing and linear motor to enable precision drive

    · Application of multi sensor for compound measurement

  • Productivity / Hardware

    · Measurement/Inspection method and algorithm specialized in flexible printed electronic device

    · Equipment/process calibration and monitoring (In-line, Off-line)

    · Improved Feedback about CDU/Overlay budget breakdown and Equipment/process

    · Detection and classification solution of printing process defect

    · Customize Hardware / UI Software

Specifications


Parameter
Categorization
Specification

Pattern Position Measurement

XYZ Repeatability
2.5um
XYZ Accuracy
5um
Rotary Repeatability
2.5um
Rotary Accuracy
5um
Pattern shape measurement
Lateral Resolution
0.5um
Vertical Resolution
0.1um
Thickness measurement
Repeatability
10%
Resolution
10um
Roll shape measurement
Roundness & Cylindricity
2.5um (선 길이 환산)
Diameter Repeatability
2.5um
Diameter Accuracy
5um
Throughput
XYZ Settling Time
500ms
Rotary Settling Time
500ms


■ Customizable Hardware/Software UI