Process Performance

· Application of 6 laser scales for 6 degrees of freedom measurement

· Optimum design to realize Abbe error "0"

· Application of plane mirror

· Application of temperature, humidity and barometric pressure sensor to enable active compensation

Productivity / Hardware

· Secure stability through symmetrical and highly rigid structure

· Consideration of weather errors

· Application of high precision probe and optical system

· Flexible driving connection between driving parts and carriers

· Both touch and optical measurement are available.

· Customize Hardware / UI Software